RI - 12500HDI MultiBeam SEM-FIB System

The RI - 12800HD is a MultiBeam processing system that incorporates a thermionic SEM and a high-performance ion column. The instrument can be used as a SEM system to observe specimen surfaces; or section milling of milling of a region using FIB can be performed, followed by element analysis and observation of the internal portions using SEM. The FIB can be used for fine milling and TEM thin-film sample preparation. The large chamber expands the possible range of applications. A low-vacuum mode enables SEM observation without any coating of insulating material, so it can be used in almost any field.

Total analysis using a combination of thermionic electron emission SEM and high-performance FIB column
The RI - 12500HDI incorporates a High-Power FIB column, with a maximum probe current of 60 nA, to enable fast milling. It is possible to perform cross-section milling of a larger region, and to also perform SEM observation, EDS* or EBSD* analysis of the site. Since the sequence of tasks can be performed within the same vacuum space, the analysis can be performed without any surface deterioration of the sample due to oxidiation. The large stage can accommodate a specimen with a diameter of up to 75 mm and a height of 30 mm* optional attachment

Serial slicing and sampling function
The RI - 12500HDI column arrangement has been designed so that a cross section that has been milled using the FIB can be observed with the SEM without changing the stage tilting angle. This enables the user to perform a continuous automated sequence of operations of FIB section milling and SEM image acquisition. If the optional software application Stack-N-Viz is used, 3-dimensional images can be reconstructed to provide a better understanding of the internal structure of the specimen.

Compatible with other Roston products
The HD series uses the options that are compatible with the JEM series and JSM series devices. Specimens fabricated using the HD series can be transferred between other Roston systems efficiently, to obtain even more detailed analysis with excellent throughput. For example, if a shuttle retainer is used between the JEM series (like the JEM-ARM200F) TEM holder tip and RI - 12500HDI stage (Fig 1), there is no need for complicated handling of a TEM sample that is mounted to the mesh grid, allowing improved throughput.

Specifications
Ion source - Ga liquid metal ion source
Accelerating voltages - 1 to 30 kV (in 5 kV steps)
Magnification - ×60 (for searching for a field) ×200~×300,000
Image resolution - 5 nm (at 30 kV)
Beam current - Up to 60 nA (at 30 kV)
Movable aperture - 12 steps (motor drive)
Ion beam shapes during milling - Rectangle, line, and spot
Optional attachments:
Gas injection system 2 (IB-02100GIS2)
Carbon Deposition Cartridge (IB-52110CDC2)
Tungsten Deposition Cartridge (IB-52120WDC2)
Platinum Deposition Cartridge (IB-52130WDC2)
Side Entry Goniometer Stage (IB-01040SEG)
Probe Current Detector (IB-04010PCD)
Operation Panel (IB-05010OP)
Stage Navigation System (IB-01200SNS)
FIB Tip-on Holder (EM-02210)
FIB Bulk-Specimen Holder (EM-02220)
FIB Bulk-Specimen Holder 1 (EM-02560FBSH1)
FIB Bulk-Specimen Holder 2 (EM-02570FBSH2)
FE-SEM Specimen Holder Adapter (EM-02580FSHA)
Shuttle Retainer (EM-02280)
Atmosphere Pick-up System (EM-02230)